ISSM 2010 - INTERNATIONAL SYMPOSIUM ON SEMICONDUCTOR MANUFACTURING

COMMITTEE

Japan Organizing Committee

Chairman:

Katsuhiro Tsukamoto, Mitsubishi Electric Corporation

Vice Chairman:

Tadahiro Ohmi, Tohoku University

Committee:

Keiji Horioka, Applied Materials Japan, Inc.

Yoshitake Ito, Omron Corporation

Nobuo Kawase, Canon, Inc.

Haruyoshi Yagi, Fujitsu Semiconductor Limited

Masataka Hirose, National Institute of Advanced Industrial Science and Technology(AIST)

Michihiro Inoue, National Institute of Advanced Industrial Science and Technology(AIST)

Akikazu Tanimoto, Nikon Corporation

Hirofumi Uchida, Panasonic Corporation

Tatsuo Yoshino, Renesas Electronics Corporation

Tadashi Nishimura, Renesas Electronics Corporation

Takahisa Yamaha, Rohm Co., Ltd.

Teruo Tabata, SANYO Electric Co., Ltd.

Hiroshi Nishioka, Sharp Corporation

Yuji Tsukamoto, Tokyo Electron Limited

Masakazu Shiozaki, Toshiba Corporation

Japan Advisory Board

Board Members

Tsuyoshi Kawanishi, TEK Consulting

Hajime Sasaki, NEC Corporation

Satoru Ito, Hitachi, Limited

Japan Advisory Committee

Committee:

Masahiro Kashiwagi, Kumamoto Industrial Research Institute

Yasuo Mizokami, Molecular Imprints

Yoichi Akasaka, Osaka University

Shigeru Nakayama, SEMI

Kimio Yanagida, Fukushima Prefecture

Japan Executive Committee

Chairman:

Michihiro Inoue, National Institute of Advanced Industrial Science and Technology(AIST)

Vice Chairman:

Makoto Hirayama, State University of New York, College of Nanoscale Science and Engineering

Shuuichi Inoue, Renesas Electronics Corporation

Committee:

Keiji Horioka, Applied Materials Japan, Inc.

Kensuke Uriga, Dura Systems, Inc.

Takeshi Hattori, Electronic Journal

Isamu Hanyu, Fujitsu Semiconductor, Limited

Hiroyuki Chuma, Hitotsubashi University

Naoki Kitano, Intel K.K.

Masaomi Kameyama, Nikon, Inc.

Kitamura Kouji, Omron Corporation

Hirofumi Uchida, Panasonic Corporation

Koji Maekawa, PDF Solutions, Inc.

Michio Honma, Renesas Electronics Corporation

Koichi Sakurai, Renesas Electronics Corporation

Akira Kamisawa, Rohm Co.,, Ltd.

Toshio Suganuma, SANYO Electric Co., Ltd.

Kazuma Minami, Seiko Epson Corporation

Yoichi Nakagawa, SEMI

Masayasu Tsunematsu, Semiconductor Equipment Association of Japan（SEAJ)

Jun Ueda, Semiconductor Industry Research Institute of Japan(SIRIJ)

Osamu Minato, Semiconductor Leadingedge Technologies, Inc. (Selete)

Motoshi Omori, Sharp Corporation

Yuji Tsukamoto, Tokyo Electron Limited

Takashi Yoda, Toshiba Corporation

Japan Program Committee

Chairman:

Toshiyuki Uchino, Renesas Electronics Corporation

Executive Vice
Chairman:

Ayako Shimazaki, Toshiba Corporation

Vice Chairman:

Kiyotaka Imai, KLA-Tencor Japan Ltd.

Hidetoshi Koike, Toshiba Corporation

Committee leader:

Katsutoshi Ozawa, OMRON Corporation

Shin-ichi Imai, Panasonic Corporation

Isamu Namose, Seiko Epson Corporation

Committee:

Shinsuke Mizuno, Applied Materials Japan, Inc

Eiichi Kawamura, Fujitsu Semiconductor Limited

Kenji Miyake, PMT Corporation

Kenji Watanabe, Hitachi High-Technologies Corporation

Eisuke Nishitani, Hitachi kokusai Electric Inc.

Fumitaka Homma, Oki Semiconductor Miyagi

Takatoshi Yasui, Panasonic Corporation

Takeshi Akimoto, Renesas Electronics Corporation

Michio Honma, Renesas Electronics Corporation

Yoshio Iwata, Renesas Electronics Corporation

Toshiharu Katayama, Renesas Electronics Corporation

Yoshiaki Oku, Rohm Co., Ltd.

Hiroshi Tamagawa, Rohm Co., Ltd.

Tetsuya Miwa, SANYO Semiconductor Co.,Ltd.

Masahiko Minamide, Sharp Corporation

Shinji Ochi, Sony Semiconductor Kyushu Corporation

Yuj Ezaki, Texas Instruments Japan Limited

Takanobu Kaitsuka, Tokyo Electron, Limited

Hiromi Yajima, Toshiba Corporation

International Program Committee

Chairman:

Thomas Sonderman, GlobalFoundries

Committee:

Bill Arnold, ASML

Aarthi Venkateshan, Canon Anelva Corporation

Jeff McNeil, Cypress

Lothar Pfitzner, Fraunhofer - IIS-B

Linda Milor, Georgia Tech

Els Van Moorhem, IMEC

Scott Kramer, SEMATECH

Shi-Chung Chang, National Taiwan University

Keith J. Hansen, Novellus Systems Incorporated

Fumitake Mieno, SMIC

Christian Carlier, ST Microelectronics

SY Sheen, TSMC

Risto Puhakka, VLSI Research