program
November 25
Opening Session
Session Chair: Hidenori Kakinuma, Rapidus
| 13:00 - 13:10 | Opening Hidetaka Nishimura Masaru Eguchi Shunichi Shibuki |
Tutorial speech 1
Session Chair: Hidenori Kakinuma, Rapidus
| 13:10 - 13:55 | Tutorial 1 Mathematical and Information Technologies for the Realization and Industrial Applications of Cyber-Physical SystemsKatsuki Fujisawa Institute of Integrated Research, Institute of Science Tokyo |
Session 1
Session Co-Chairs: Hiroyuki Morinaga, KIOXIA / Akira Kagoshima, Hitachi High-Tech
| 13:55 - 14:15 | DA-014 Improving Equipment Productivity through Text Analysis and RAGTakashi Iuchi Sony Semiconductor Manufacturing |
| 14:15 - 14:35 | DA-019 The Integration of Machine Learning and Equipment Knowledge: Two Approaches to Film Deposition Data AnalysisHuizhen,Bu Tokyo Electron Technology Solutions |
| 14:35 - 14:55 | PTL-018 Using Machine Learning and Domain Knowledge to Improve PPC SystemXueting Wang TOSHIBA ELECTRONIC DEVICES & STORAGE |
| 14:55 - 15:15 | PTL-012 Real-time Automated Recipe Creation & Verification of Single Wafer Wet Etching with Backcasting & Forecasting AIsKoki Shibata The University of Tokyo |
| 15:15 - 15:45 | Exhibiton and Break |
Keynote speech 1
Session Co-Chair: Tsuyoshi Miyatake, Renesas Electronics
| 15:45 - 16:30 | Keynote 1 Technological Trends of Power Semiconductor ModulesJunji Yamada Mitsubishi Electric Corporation |
Session 2
Session Chair: Tomoo Nakayama, Renesas Electronics / Hirofumi Tsuchiyama, INFICON
| 16:30 - 16:50 | DA-017 Human-aided Relabeling and Outlier Sample Selection for Semiconductor InspectionTeguh Budianto Toshiba |
| 16:50 - 17:10 | DA-020 Semi-Automatic Critical Dimension Measurement Method in SEM Image with Critical Point Mapping AlgorithmTakahiro Nakamura Tokyo Electron |
| 17:10 - 17:30 | DA-011 Graph-Based Clustering for Detection of Subtle Defect Patterns in High-Yield Semiconductor Wafer MapsManami Yamagiwa Mie University |
| 17:30 - 17:50 | DA-016 Detection and Localization of Defects Using Masked Image ModelingAkira Yasuda University of Tsukuba |
| 17:50 - 18:20 | Authors' Interview for Session 1 & 2 |
| 18:20 - 20:20 | Reception/Exhibition Hidetaka Nishimura, Renesas Electronics |
November 26
| 9:00 - 9:05 | Program Outline of Day 2 Shunichi Shibuki, Sony Semiconductor Manufacturing |
Keynote speech 2
Session Chair: Toshiya Hirai, Rapidus
| 9:05 - 9:50 | Keynote 2 CIM system to realize an ultimate automation at advanced semiconductor manufacturingRyuichiro Hattori Rapidus Corporation |
Session 3
Session Co-Chairs: Hisato Tanaka, Tokyo Electron / Tomoya Tanaka, Tower Partners Semiconductor
| 9:50 - 10:10 | YM-023 Building an Engineering Automation System Using Generative AI and Agentic AIHyukjun Na Aydentyx |
| 10:10 - 10:30 | PTL-015 From Detection to Diagnosis: Enhancing SPC with AI-Powered Root Cause AnalysisVishali Ragam Applied Materials |
| 10:30 - 10:50 | FAB-010 A Novel Chamber Level Smart Sampling Approach in Semiconductor ManufacturingYan-Qiu Zhang Fujian Jinhua Integrated Circuit Co., Ltd |
| 10:50 - 11:10 | YM-009 Reducing Packaging Costs in Semiconductor Fabs through Predictive Testing ModelsMelvin Lee Wei Heng Onto Innovation |
| 11:10 - 11:40 | Authors' Interview for Session 3 /Exhibition |
Tutorial speech 2
Session Chair: Kazutaka Nagashima, Toshiba Electronic Devices & Storage
| 11:40 - 12:25 | Tutorial 2 Process Informatics in Semiconductor ManufacturingHironori Moki Tokyo Electron Ltd. |
| 12:25 - 13:20 | Lunch time/Exhibition |
Keynote speech 3
Session Chair: Kenji Miyake, Office Miyake
| 13:20 - 14:05 | Keynote 3 Back-End Technologies for Diversified Semiconductors - Power & CISShinji Baba Amkor Technology Japan, Inc. |
Session 4
Session Co-Chairs: Koichi Tateishi, Azbil / Osamu Ohishi, IBM Japan Digital Services Company
| 14:05 - 14:25 | SN-022 Practical Use Case of AI/ML at the Edge for Run-by-Run and Real-TimeCharlie Sowerby INFICON |
| 14:25 - 14:45 | VM-013 Model-based liquid precursor supply for baking vaporization moduleDaisuke Hayashi HORIBA STEC, Co., Ltd. |
| 14:45 - 15:05 | YM-021 Yield Enhancement activity for small-volume CIS product in FoundryTakatoshi Yasui Tower Partners Semiconductor |
| 15:05 - 15:30 | Authors' Interview for Session 4 /Exhibition |
| 15:30 - 15:40 | Award Ceremony Shunichi ShibukiSony Semiconductor Manufacturing |
| 15:40 - 15:45 | Closing Hidetaka NishimuraRenesas Electronics |
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